Open AccessDesign and fabrication of a micro-optic switch
Author(s) -
Wei Li,
Jing Liang,
Zhongzhu Liang,
Xiaoqi Li,
Weibiao Wang,
Yaohua Zhong,
DeGui Sun
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.006324
Subject(s) - fabrication , cantilever , materials science , polyimide , electromagnetic coil , optical switch , electroplating , optics , optoelectronics , magnet , electrical engineering , nanotechnology , physics , composite material , medicine , alternative medicine , engineering , pathology , layer (electronics)
In this paper, a polyimide cantilever micro-optic switch of electromagnetic actuation is studied. The model of the electromagnetic actuation is proposed and simulated using finite element method. The best efficiency of electromagnetic force for switching operations is obtained and the parameters of the coil and magnet are determined. During the practical fabrication, the thick resist patterning and electroplating technology is employed to fabricate the electromagnetic actuation. Both the theoretical and experimental results indicate that the balanceable distance of the polyimide cantilever for implementing optical switches is about 1.28 mm with 0.4 A current pulse input, The final experimental results of optical performance for the fabricated micro-optic 1 x 4 switch include the switching time of about 20 ms and the insertion loss of about 0.73 dB.