Open AccessMultilayer coatings monitoring using admittance diagram
Author(s) -
Cheng-Chung Lee,
Yu-Jen Chen
Publication year - 2008
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.006119
Subject(s) - admittance , optics , diagram , compensation (psychology) , reflection (computer programming) , materials science , coating , process (computing) , optical coating , acoustics , computer science , physics , composite material , engineering , electrical engineering , electrical impedance , psychology , operating system , database , psychoanalysis , programming language
A method based on admittance diagram called Admittance Real-time Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were compared with that of the conventional method by using runsheet diagram. The in situ error compensation of ARM showed a great improvement in the optical performance when utilized in an anti-reflection coating process.