Open AccessElectromagnetic ray tracing model for line structures
Author(s) -
Chin Boon Tan,
Andrew Khoh,
Song Huat Yeo
Publication year - 2008
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.003589
Subject(s) - ray tracing (physics) , optics , finite difference time domain method , diffraction , physics , beam tracing , electromagnetic field , geometrical optics , distributed ray tracing , electromagnetic radiation , scattering , computational electromagnetics , physical optics , wavelength , field (mathematics) , line (geometry) , computational physics , geometry , mathematics , quantum mechanics , pure mathematics
In this paper, a model for electromagnetic scattering of line structures is established based on high frequency approximation approach - ray tracing. This electromagnetic ray tracing (ERT) model gives the advantage of identifying each physical field that contributes to the total solution of the scattering phenomenon. Besides the geometrical optics field, different diffracted fields associated with the line structures are also discussed and formulated. A step by step addition of each electromagnetic field is given to elucidate the causes of a disturbance in the amplitude profile. The accuracy of the ERT model is also discussed by comparing with the reference finite difference time domain (FDTD) solution, which shows a promising result for a single polysilicon line structure with width of as narrow as 0.4 wavelength.