Open AccessExperimental demonstration of a wafer-level flexible probe for optical waveguide testing
Author(s) -
Abdullah J. Zakariya,
Tao Liu,
Roberto R. Panepucci
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.016210
Subject(s) - wafer , waveguide , materials science , optics , coupling (piping) , fabrication , optoelectronics , composite material , physics , medicine , alternative medicine , pathology
A flexible optical probe that accomplishes wafer-level directional coupling of light into optical waveguides is investigated theoretically and experimentally. Simulated results indicate high coupling efficiencies in excess of 80% for a range of parameters. Probe fabrication was implemented using SU8 as flexible waveguide material. Coupling of light from flexible probe to an S-shaped test waveguide demonstrated 11% efficiency compared to direct butt coupling. These results may lead to increased yield, shorter development cycles and overall savings in PLC packaging costs.