Open AccessA compact system for simultaneous measurement of linear and angular displacements of nano-stages
Author(s) -
Jae Wan Kim,
Chu-Shik Kang,
Jong-Ahn Kim,
Tae Bong Eom,
Mijung Cho,
Hong Kong
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.015759
Subject(s) - optics , michelson interferometer , collimator , angular displacement , astronomical interferometer , physics , displacement (psychology) , interferometry , detector , measure (data warehouse) , position (finance) , acoustics , computer science , psychology , finance , database , economics , psychotherapist
We report on a novel compact interferometery system for measuring parasitic motions of a precision stage. It is a combination of a Michelson interferometer with an auto-collimator, of which full physical dimension is mere 70 mm x80 mm x35 mm (WxLxH) including optical components, photo-detectors, and electronic circuits. Since the beams, which measure displacement and angle, can be directed at the same position on the moving mirror, the system is applicable for testing small nano-stages where commercial interferometers are not able to be used. And thus, errors from nano-scale deformation of the moving mirror can be minimized. We find that the residual errors of linear and angular motion measurements are 2.5 nm in peak-to-peak and 0.2'', respectively.