Open AccessA photonic crystal ring resonator formed by SOI nano-rods
Author(s) -
WeiYu Chiu,
Timothy D. Huang,
Yelin Wu,
YiJen Chan,
Chia-Hunag Hou,
Huang Ta Chien,
Chii Chang Chen
Publication year - 2007
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.015500
Subject(s) - silicon on insulator , photonic crystal , materials science , resonator , optics , optoelectronics , electron beam lithography , yablonovite , wafer , photonic integrated circuit , wavelength , rod , hexagonal lattice , silicon , layer (electronics) , resist , nanotechnology , physics , condensed matter physics , antiferromagnetism , medicine , alternative medicine , pathology
The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55mum. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31mum/1.55mum wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.