Open AccessHigh speed in situ depth profiling of ultrafast micromachining
Author(s) -
Paul J. L. Webster,
Matthew S. Muller,
James M. Fraser
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.014967
Subject(s) - surface micromachining , optics , materials science , interferometry , machining , ultrashort pulse , laser ablation , laser , physics , medicine , alternative medicine , pathology , fabrication , metallurgy
We demonstrate real-time depth profiling of ultrafast micromachining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 mum. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic.