Open AccessMagnetically actuated MEMS microlens scanner for in vivo medical imaging†
Author(s) -
Chin Pang Billy Siu,
Haishan Zeng,
Mu Chiao
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.011154
Subject(s) - scanner , materials science , microlens , optics , microelectromechanical systems , polydimethylsiloxane , magnetic field , optoelectronics , lens (geology) , physics , nanotechnology , quantum mechanics
A magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane (PDMS) microlens is demonstrated. The device is driven by an external AC magnetic field, eliminating chip circuitry and thermal deformation from joule heating. The resonant frequency of 215.2 Hz and scanning angle of 23 of the scanner have been demonstrated. Experimental studies and optical modeling have shown that this microlens scanner achieves a scanning range of 125 mum when actuated by an external magnetic field of 22.2x10-3 Tesla flux density. The device has potential applications in in vivo medical imaging for minimally invasive diagnoses.