Open AccessNondispersive optical phase shifter array using microelectromechanical systems based gratings
Author(s) -
Guangya Zhou,
Fook Siong Chau
Publication year - 2007
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.010958
Subject(s) - optics , phased array optics , phase shift module , microelectromechanical systems , grating , materials science , diffraction grating , phased array , silicon on insulator , optoelectronics , surface micromachining , broadband , silicon , insertion loss , fabrication , physics , computer science , telecommunications , medicine , alternative medicine , pathology , antenna (radio)
We present a broadband nondispersive optical phase shifter array based on microelectromechanical systems (MEMS) technology. The device consists of an array of micro-grating elements. Each grating element utilizes an in-plane translational motion to produce a phase shift to the diffracted light beam. The phase shift is dependent only on the ratio of the grating displacement to its period, and thus independent of incident wavelength. The proposed operation principle was demonstrated with a prototype device developed using a silicon-on-insulator (SOI) micromachining process. This MEMS nondispersive phase-shifter array may be useful in many multispectral applications including broadband optical phased arrays.