Fabrication and characterization of microlens arrays using a cantilever-based spotter | Zendy

V. Bardinal | Zendy; E. Daran | Zendy; Thierry Leïchlé | Zendy; C. Vergnenègre | Zendy; Christophe Levallois | Zendy; T. Camps | Zendy; Véronique Conédéra | Zendy; JeanBaptiste Doucet | Zendy; F. Carcenac | Zendy; Heidi Ottevaere | Zendy; Hugo Thienpont | Zendy

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Fabrication and characterization of microlens arrays using a cantilever-based spotter

Author(s) -

V. Bardinal,

E. Daran,

Thierry Leïchlé,

C. Vergnenègre,

Christophe Levallois,

T. Camps,

Véronique Conédéra,

JeanBaptiste Doucet,

F. Carcenac,

Heidi Ottevaere,

Hugo Thienpont

Publication year - 2007

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.15.006900

Subject(s) - microlens , optics , materials science , focal length , profilometer , cantilever , fabrication , scanning electron microscope , surface roughness , white light interferometry , surface finish , interferometry , lens (geology) , physics , medicine , alternative medicine , pathology , composite material

We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130mum] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181mum] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14.

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