Open AccessDeposition of tungsten nanogratings induced by a single femtosecond laser beam
Author(s) -
Haitao Zhang,
Mingzhen Tang,
Jerry McCoy,
Tsing-Hua Her
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.005937
Subject(s) - femtosecond , materials science , optics , tungsten , chemical vapor deposition , laser , optoelectronics , beam (structure) , deposition (geology) , laser beams , paleontology , physics , sediment , metallurgy , biology
Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.