Deposition of tungsten nanogratings induced by a single femtosecond laser beam | Zendy

HaiTao Zhang | Zendy; Mingzhen Tang | Zendy; Jerry McCoy | Zendy; Tsing-Hua Her | Zendy

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Deposition of tungsten nanogratings induced by a single femtosecond laser beam

Author(s) -

HaiTao Zhang,

Mingzhen Tang,

Jerry McCoy,

Tsing-Hua Her

Publication year - 2007

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.15.005937

Subject(s) - femtosecond , materials science , optics , tungsten , chemical vapor deposition , laser , optoelectronics , beam (structure) , deposition (geology) , laser beams , paleontology , physics , sediment , metallurgy , biology

Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.

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