Open AccessMicro actuated grating for multi-beam optical pickups
Author(s) -
Chi Hung Lee,
Yi Chiu,
Han Ping D. Shieh
Publication year - 2007
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.001408
Subject(s) - grating , optics , materials science , actuator , diffraction grating , beam (structure) , silicon , diffraction , silicon nitride , voltage , optoelectronics , physics , computer science , quantum mechanics , artificial intelligence
A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively.