Laser-lithography on non-planar surfaces | Zendy

Daniela Radtke | Zendy; Uwe D. Zeitner | Zendy

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Laser-lithography on non-planar surfaces

Author(s) -

Daniela Radtke,

Uwe D. Zeitner

Publication year - 2007

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.15.001167

Subject(s) - achromatic lens , optics , lithography , materials science , planar , laser , maskless lithography , lens (geology) , photolithography , realization (probability) , electron beam lithography , optoelectronics , resist , nanotechnology , physics , computer science , statistics , computer graphics (images) , mathematics , layer (electronics)

An extensively modified laser-lithography system specially developed for realization of micro-optical profiles on non-planar surfaces is presented. This extended system offers new possibilities of fabricating micro-optical elements without the technology related restriction of surface shape that existed so far. A diffractive lens on a convex spherical substrate is designed and fabricated as an example for hybrid achromatic refractive-diffractive elements to demonstrate the functionality of the system and the wide range of possible new applications.

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