Open AccessLaser-lithography on non-planar surfaces
Author(s) -
Daniela Radtke,
Uwe D. Zeitner
Publication year - 2007
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.15.001167
Subject(s) - achromatic lens , optics , lithography , materials science , planar , laser , maskless lithography , lens (geology) , photolithography , realization (probability) , electron beam lithography , optoelectronics , resist , nanotechnology , physics , computer science , statistics , computer graphics (images) , mathematics , layer (electronics)
An extensively modified laser-lithography system specially developed for realization of micro-optical profiles on non-planar surfaces is presented. This extended system offers new possibilities of fabricating micro-optical elements without the technology related restriction of surface shape that existed so far. A diffractive lens on a convex spherical substrate is designed and fabricated as an example for hybrid achromatic refractive-diffractive elements to demonstrate the functionality of the system and the wide range of possible new applications.