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Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves
Author(s) -
Jiyoung Chu,
Seung-Woo Kim
Publication year - 2006
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.14.005961
Subject(s) - optics , diffraction , interferometry , shearing (physics) , physics , shearing interferometer , metrology , point (geometry) , distance measurement , astronomical interferometer , geometry , computer science , mathematics , thermodynamics , artificial intelligence
We describe a method of absolute distance measurement based on the lateral shearing interferometry of point-diffracted spherical waves. A unique feature is that the distance measurement is not confined only along a single line of the optical axis, but the target is allowed to take movement freely within a volumetric measurement space formed by the aperture angle of point-diffraction. Detailed measurement theory is explained along with experimental verification.

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