Open AccessHighly selective and compact tunable MOEMS photonic crystal Fabry-Perot filter
Author(s) -
Salim Boutami,
Badhise Ben Bakir,
Jean Louis Leclercq,
Xavier Letartre,
P. Rojo-Roméo,
M. Garrigues,
Pierre Viktorovitch,
I. Sagnes,
Luc Legratiet,
M. Strassner
Publication year - 2006
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.14.003129
Subject(s) - optics , full width at half maximum , resonator , fabry–pérot interferometer , photonic crystal , materials science , free spectral range , reflector (photography) , optoelectronics , distributed bragg reflector , optical filter , physics , wavelength , light source
The authors report a compact and highly selective tunable filter using a Fabry-Perot resonator combining a bottom micromachined 3-pair-InP/air-gap Bragg reflector with a top photonic crystal slab mirror. It is based on the coupling between radiated vertical cavity modes and waveguided modes of the photonic crystal. The full-width at half maximum (FWHM) of the resonance, as measured by microreflectivity experiments, is close to 1.5nm (around 1.55 microm). The presence of the photonic crystal slab mirror results in a very compact resonator, with a limited number of layers. The demonstrator was tuned over a 20nm range for a 4V tuning voltage, the FWHM being kept below 2.5nm. Bending of membranes is a critical issue, and better results (FWHM=0.5nm) should be obtained on the same structure if this technological point is fixed.