Open AccessOptical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance
Author(s) -
Byung Jin Chun,
Chang Kwon Hwangbo,
Jong Sup Kim
Publication year - 2006
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.14.002473
Subject(s) - admittance , optics , materials science , dielectric , optical filter , filter (signal processing) , refractive index , optoelectronics , computer science , physics , electrical impedance , quantum mechanics , computer vision
The optical monitoring method is described to compensate for the thickness error of nonquarterwave layers of dielectric multilayer filters, using optical admittance during deposition. Stability is confirmed by computer simulation of random thickness error generation in layers. In addition, a band split filter consisting of 61 nonquarterwave and nonperiodic layers is deposited in the proposed method, resulting in high spectral performance, as the design requires.