Open AccessUV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask
Author(s) -
Weixing Yu,
Xiaocong Yuan
Publication year - 2003
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.11.002253
Subject(s) - microlens , materials science , optics , fabrication , grayscale , refractive index , volume (thermodynamics) , optoelectronics , lens (geology) , medicine , physics , alternative medicine , pixel , pathology , quantum mechanics
We report a simple method for forming surface corrugation of microlenses based on a volume growth effect of sol-gel glass. The volume growth effect was fully calibrated with a high-energy beam-sensitive grayscale mask, where the amount of growth was determined as a function of electron-beam-induced optical densities in the mask. This technique provides an excellent surface smoothness compared with other development based fabrication techniques. For example, a refractive microlens with a diameter of 140 microm and a sag height of 2.13 microm was demonstrated.