Open AccessDiamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region
Author(s) -
Mikael Karlsson,
Fredrik Nikolajeff
Publication year - 2003
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.11.000502
Subject(s) - materials science , optics , diamond , grating , electron beam lithography , etching (microfabrication) , lithography , optoelectronics , diamond turning , fabrication , anti reflective coating , reflection (computer programming) , fresnel equations , diffraction grating , coating , resist , refractive index , nanotechnology , medicine , physics , alternative medicine , layer (electronics) , pathology , computer science , composite material , programming language
Fabrication and evaluation of a subwavelength grating in diamond, designed to reduce the Fresnel reflection, is demonstrated. The antireflection (AR) structures are designed to reduce the surface reflection at an illuminating wavelength of 10.6 microm. With this AR-treatment, where no other material is introduced (i.e., no thin film coating), the unique properties of diamond can be fully used. The fabricated AR structures were optically evaluated with a spectrophotometer. The transmission through a diamond substrate with AR structures on both sides was increased from 71% to 97%, with a theoretical value of 99%. Microlenses in diamond are also demonstrated. The lenses are evaluated with interferometers and show good performance. The micro-optical structures were fabricated by electron-beam lithography or photolithographic methods followed by plasma etching.