Open AccessOne-step transfer of diffractive structure from a designed pattern to a replica by use of a hybrid solgel film
Author(s) -
Yongqi Fu,
Ngoi Kok Ann Bryan
Publication year - 2002
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.10.000436
Subject(s) - materials science , optics , stamping , silicon , replication (statistics) , diffraction , mold , substrate (aquarium) , microfabrication , diffraction efficiency , surface roughness , transfer printing , optoelectronics , fabrication , composite material , metallurgy , medicine , statistics , physics , mathematics , oceanography , alternative medicine , pathology , geology
A one-step method for microfabrication of a diffractive lens mold with continuous relief, including a solgel process for replication, is presented. The mold is fabricated by focused ion beam milling (FIBM) on a substrate of bulk silicon and is then used directly for replication of the diffractive structure by means of a hybrid solgel glass stamping process. The surface roughness of the replica, Ra, is 4 nm over a 5 m x 5 m area. The measured diffraction efficiency is 86% and is influenced by accumulated mold geometry and solgel process errors. The demonstrated process of direct stamping by use of the master fabricated by FIBM offers the potential for mass production at very low cost.