Open AccessState-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited]
Author(s) -
Andrés G. Marrugo,
Feng Gao,
Song Zhang
Publication year - 2020
Publication title -
journal of the optical society of america. a, optics, image science, and vision./journal of the optical society of america. a, online
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.803
H-Index - 158
eISSN - 1520-8532
pISSN - 1084-7529
DOI - 10.1364/josaa.398644
Subject(s) - metrology , surface metrology , focus (optics) , current (fluid) , surface (topology) , computer science , nanotechnology , systems engineering , mechanical engineering , materials science , optics , engineering , physics , electrical engineering , surface finish , profilometer , geometry , mathematics
This paper reviews recent developments of non-contact three-dimensional (3D) surface metrology using an active structured optical probe. We focus primarily on those active non-contact 3D surface measurement techniques that could be applicable to the manufacturing industry. We discuss principles of each technology, and its advantageous characteristics as well as limitations. Towards the end, we discuss our perspectives on the current technological challenges in designing and implementing these methods in practical applications.