Open AccessDesigning Lithographic Objectives by Constructing Saddle Points
Author(s) -
Florian Bociort,
Oana Marinescu
Publication year - 2006
Publication title -
data archiving and networked services (dans)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1364/iodc.2006.tua3
Subject(s) - maxima and minima , lithography , saddle point , saddle , computer science , photolithography , insert (composites) , optics , engineering , mathematics , mechanical engineering , physics , geometry , mathematical analysis
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