Open AccessRealization of Tellurium-based all Dielectric Optical Metamaterials using a Multi-cycle Deposition-etch Process
Author(s) -
Sheng Liu,
Jon F. Ihlefeld,
Jason Dominguez,
Edward Gonzales,
John Eric Bower,
B. Burckel,
Michael B. Sinclair,
Igal Brener
Publication year - 2013
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1364/cleo_si.2013.cw3o.2
Subject(s) - tellurium , materials science , dielectric , metamaterial , etching (microfabrication) , optoelectronics , deposition (geology) , split ring resonator , nanotechnology , metallurgy , layer (electronics) , paleontology , sediment , biology
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