Open AccessLaser annealing with a 308-nm Xe-CI pulsed escimer laser
Author(s) -
R. T. Hodgson,
Wen-Wei Chou,
T. J. McKee
Publication year - 1981
Publication title -
conference on lasers and electro-optics
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1364/cleo.1981.wj20
Subject(s) - laser , materials science , optoelectronics , photon , optics , excimer laser , x ray laser , annealing (glass) , excimer , laser beams , laser power scaling , physics , composite material