Open AccessMicromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation
Author(s) -
Christophe Gorecki,
Justine Lullin,
Stéphane Perrin,
Sylwester Bargiel,
Jorge Albero,
Olivier Gaiffe,
Joel Rutkowski,
Jean-Marc Cote,
Johann Krauter,
Wolfgang Osten,
W.-S. Wang,
Michael Weimer,
Joerg Froemel
Publication year - 2019
Publication title -
biomedical optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.362
H-Index - 86
ISSN - 2156-7085
DOI - 10.1364/boe.10.001111
Subject(s) - microfabrication , interferometry , optics , optical coherence tomography , computer science , materials science , physics , medicine , alternative medicine , pathology , fabrication
OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies. We propose an active array of 4x4 Mirau microinterferometers where the reference micro-mirrors are carried by a vertical comb-drive microactuator, enabling the implementation of the phase-shifting technique that improves the sensitivity and eliminates unwanted interferometric terms. We focus on the design of the imaging system, the microfabrication and the assembly of the Mirau microinterferometer, and the swept-source OCT imaging.