Open AccessGrowth and characterization of Sc2O3 doped Ta2O5 thin films
Author(s) -
M. Fazio,
L. Yang,
A. S. Markosyan,
R. Bassiri,
M. M. Fejer,
Carmen S. Mei
Publication year - 2019
Publication title -
applied optics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.668
H-Index - 197
eISSN - 2155-3165
pISSN - 1559-128X
DOI - 10.1364/ao.59.00a106
Subject(s) - algorithm , artificial intelligence , computer science