Stress compensation by deposition of a nonuniform corrective coating | Zendy

J. B. Oliver | Zendy; J. Spaulding | Zendy; B. Charles | Zendy

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Stress compensation by deposition of a nonuniform corrective coating

Author(s) -

J. B. Oliver,

J. Spaulding,

B. Charles

Publication year - 2019

Publication title -

applied optics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.668

H-Index - 197

eISSN - 2155-3165

pISSN - 1559-128X

DOI - 10.1364/ao.59.000a54

Subject(s) - coating , materials science , optics , compensation (psychology) , layer (electronics) , reflector (photography) , deformation (meteorology) , stress (linguistics) , finite element method , optical coating , deposition (geology) , substrate (aquarium) , composite material , structural engineering , geology , engineering , psychology , paleontology , light source , linguistics , philosophy , physics , oceanography , sediment , psychoanalysis

Surface deformation by coating stress is compensated by prefiguring the substrate with a radially nonuniform layer of dense silica. Stresses in the compensation layer and reflector are modeled using finite element analysis to determine the optimal thickness profile, with the deposited coating reducing the surface deformation by 90%. This process is intended to allow implementation of both the compensation layer and the traditional multilayer coating in a single vacuum cycle.

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