Open AccessFourier transform infrared spectrometer based on an electrothermal MEMS mirror
Author(s) -
Donglin Wang,
Hongqiong Liu,
Jicheng Zhang,
Chunming Qiao,
Wei Wang,
Xiaoyang Zhang,
Huikai Xie
Publication year - 2018
Publication title -
applied optics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.668
H-Index - 197
eISSN - 2155-3165
pISSN - 1559-128X
DOI - 10.1364/ao.57.005956
Subject(s) - optics , microelectromechanical systems , spectrometer , fourier transform infrared spectroscopy , fourier transform , interferometry , materials science , fourier transform spectroscopy , interpolation (computer graphics) , infrared , physics , optoelectronics , motion (physics) , classical mechanics , quantum mechanics
This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.