Open AccessDesigning optical metamaterial with hyperbolic dispersion based on an Al:ZnO/ZnO nano-layered structure using the atomic layer deposition technique
Author(s) -
Priscilla Kelly,
Mingzhao Liu,
Lyuba Kuznetsova
Publication year - 2016
Publication title -
applied optics
Language(s) - English
Resource type - Journals
ISSN - 0003-6935
DOI - 10.1364/ao.55.002993
Subject(s) - materials science , ellipsometry , atomic layer deposition , metamaterial , permittivity , dispersion (optics) , dielectric , optics , optoelectronics , layer (electronics) , thin film , nanotechnology , physics
Nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1:9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 μm wavelength.