Open AccessMolybdenum/silicon multilayer components for high harmonic generation sources
Author(s) -
Eric M. Gullikson,
Christopher N. Anderson,
Seong-Sue Kim,
Donggun Lee,
Ryan Miyakawa,
Farhad Salmassi,
Patrick Naulleau
Publication year - 2015
Publication title -
applied optics
Language(s) - Uncategorized
Resource type - Journals
ISSN - 0003-6935
DOI - 10.1364/ao.54.004280
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , optics , high harmonic generation , materials science , beam splitter , optoelectronics , fabrication , harmonic , lithography , physics , laser , medicine , alternative medicine , pathology , quantum mechanics
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