Open AccessNew Miniaturized Infrared Sensor Platform for Industrial Applications
Author(s) -
Jarkko Antila
Publication year - 2015
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1364/aio.2015.ait3e.3
Subject(s) - microelectromechanical systems , computer science , infrared , point (geometry) , fourier transform infrared spectroscopy , identification (biology) , process engineering , systems engineering , electronic engineering , electrical engineering , engineering , materials science , nanotechnology , physics , optics , geometry , mathematics , botany , chemical engineering , biology