Open AccessInvestigation of Post Annealing Effect on the PZT Thin Films
Author(s) -
Seong-Soo Choi,
Juyun Park,
SungWi Koh,
Yun Chan Kang
Publication year - 2015
Publication title -
joseon ja-yeon gwahag nonmunjib
Language(s) - English
Resource type - Journals
ISSN - 2005-1042
DOI - 10.13160/ricns.2015.8.4.244
Subject(s) - materials science , pyrochlore , x ray photoelectron spectroscopy , annealing (glass) , thin film , analytical chemistry (journal) , sputter deposition , perovskite (structure) , sputtering , composite material , mineralogy , phase (matter) , crystallography , chemical engineering , nanotechnology , chemistry , organic chemistry , chromatography , engineering