Open AccessStructural And Optical Characterization Of DC Reactive Magnetron Sputtered Cu3N Films
Author(s) -
K. J. Reddy,
P. Sreedhara Reddy,
S. Uthanna
Publication year - 2008
Publication title -
material science research india/material science research india
Language(s) - English
Resource type - Journals
eISSN - 2394-0565
pISSN - 0973-3469
DOI - 10.13005/msri/050134
Subject(s) - materials science , characterization (materials science) , cavity magnetron , thin film , sputtering , nanotechnology