Open AccessThe Heterostructure ZnO/Al/SiO2/Si Fabrication for Piezoelectric SAW and BAW Transducers and Sensors
Author(s) -
Rafik Serhane,
Fayçal Hadj-Larbi,
S. Lafane
Publication year - 2017
Publication title -
journal of new technology and materials
Language(s) - English
Resource type - Journals
ISSN - 2170-161X
DOI - 10.12816/0044035
Subject(s) - fabrication , piezoelectricity , materials science , heterojunction , optoelectronics , transducer , silicon , acoustics , composite material , physics , medicine , alternative medicine , pathology
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