Open AccessLarge Storage Window in a-SiNx/nc-Si/a-SiNx Sandwiched Structure
Author(s) -
Xiang Wang,
Chao Song
Publication year - 2017
Publication title -
destech transactions on engineering and technology research
Language(s) - English
Resource type - Journals
ISSN - 2475-885X
DOI - 10.12783/dtetr/apetc2017/11027
Subject(s) - plasma enhanced chemical vapor deposition , materials science , quantum dot , chemical vapor deposition , hysteresis , silicon nitride , nanocrystal , layer (electronics) , optoelectronics , silane , electron , silicon , voltage , nanotechnology , analytical chemistry (journal) , electrical engineering , condensed matter physics , chemistry , composite material , physics , engineering , quantum mechanics , chromatography