Open AccessMaterial Property Analysis of Amorphous Metallic Thin Films as Diffusion Barrier Layer
Author(s) -
Po-Hsien Sung,
Tei-chen Chen
Publication year - 2018
Publication title -
destech transactions on computer science and engineering
Language(s) - English
Resource type - Journals
ISSN - 2475-8841
DOI - 10.12783/dtcse/cmsam2018/26547
Subject(s) - materials science , diffusion barrier , barrier layer , layer (electronics) , amorphous solid , diffusion , metal , property (philosophy) , composite material , chemistry , metallurgy , thermodynamics , crystallography , physics , philosophy , epistemology