Open AccessScanning Force Microscopy Studies of Implanted Silicon Crystals
Author(s) -
Janusz Lekki,
Małgorzata Lekka,
H. Romano,
B. Cleff,
Z. Stachura
Publication year - 1996
Publication title -
acta physica polonica. a
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.89.315
Subject(s) - materials science , cantilever , silicon , friction coefficient , composite material , microscope , atomic force microscopy , ball (mathematics) , coefficient of friction , scanning electron microscope , nanotechnology , optics , metallurgy , geometry , physics , mathematics