Open AccessDual Role of TiN Reaction Barrier in Gold Based Metallization to GaAs
Author(s) -
A. Piotrowska,
E. Kamińska,
M. Guziewicz,
J. Adamczewska,
Sebastian Kwiatkowski,
A. Turos
Publication year - 1992
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.82.857
Subject(s) - tin , materials science , dual (grammatical number) , gold alloys , nanotechnology , metallurgy , alloy , art , literature