Open AccessMonitoring Removal of W Layer from Ag Substrate Using Balmer-α Emission of Backscattered Hydrogen Atoms in Low Density Gas Discharge
Author(s) -
S. Ertmer,
O. Marchuk,
S. Dickheuer,
S. Heuer,
Ph. Mertens,
M. Rasiński,
B. Göths,
S. Brezinsek,
A. Houben,
Ch. Linsmeier,
A. Kreter
Publication year - 2020
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.138.643
Subject(s) - balmer series , materials science , hydrogen , layer (electronics) , substrate (aquarium) , electric discharge in gases , atomic physics , analytical chemistry (journal) , emission spectrum , nanotechnology , chemistry , physics , spectral line , oceanography , organic chemistry , quantum mechanics , astronomy , geology , chromatography