Open AccessEffects of Nitrogen Selective Sputtering and Flaking of Nanostructured Coating TiN, TiAlN, TiAlYN, TiCrN, (TiHfZrVNb)N under Helium Ion Irradiation
Author(s) -
С. В. Константинов,
Ф. Ф. Комаров
Publication year - 2019
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.136.303
Subject(s) - tin , materials science , sputtering , irradiation , coating , helium , nitrogen , ion , metallurgy , radiochemistry , composite material , nanotechnology , thin film , chemistry , physics , organic chemistry , nuclear physics