Open AccessModification of MIS Devices by Radio-Frequency Plasma Treatment
Author(s) -
Dmitrii V. Andreev,
Г. Г. Бондаренко,
В. В. Андреев,
Vladimir M. Maslovsky,
A. A. Stolyarov
Publication year - 2019
Publication title -
acta physica polonica a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.136.263
Subject(s) - plasma , materials science , radio frequency , computer science , physics , telecommunications , nuclear physics
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