Open AccessInvestigation on the Effect of Direct Current and Integrated Pulsed Electrochemical Etching of n-Type (100) Silicon
Author(s) -
Nurul Syuhadah Mohd Razali,
Alhan Farhanah Abd Rahim,
Rosfariza Radzali,
Ainorkhilah Mahmood,
Yusmin Mohd-Yusuf,
Fatimah Zulkifli,
Ab Halim Abu Bakar
Publication year - 2019
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.135.697
Subject(s) - materials science , silicon , current (fluid) , etching (microfabrication) , direct current , electrochemistry , optoelectronics , nanotechnology , electrode , chemistry , electrical engineering , physics , voltage , thermodynamics , engineering , layer (electronics)