Open AccessImplantation Temperature Effects on the Nanoscale Optical Pattern Fabrication in a-SiC:H Films by Ga+Focused Ion Beams
Author(s) -
T. Tsvetkova,
C. David Wright,
Peiman Hosseini,
L. Bischoff,
J. Żuk
Publication year - 2013
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.123.952
Subject(s) - fabrication , materials science , nanoscopic scale , ion implantation , ion , nanotechnology , optoelectronics , chemistry , medicine , alternative medicine , pathology , organic chemistry