Open AccessThe Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
Author(s) -
Mustafa Alevli,
Çağla Özgit,
İnci Dönmez
Publication year - 2011
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.120.a-58
Subject(s) - atomic layer deposition , materials science , layer (electronics) , deposition (geology) , chemical engineering , nanotechnology , geology , paleontology , sediment , engineering