
A Novel Solid State Pulsed Power Module for Excimer Laser
Author(s) -
Claus Strowitzki
Publication year - 2009
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.115.992
Subject(s) - excimer laser , materials science , solid state , excimer , power (physics) , optoelectronics , pulsed laser , pulsed power , laser , optics , physics , engineering physics , thermodynamics