Open AccessNanostructure of Si-Ge Near-Surface Layers Produced by Ion Implantation and Laser Annealing
Author(s) -
D. Klinger,
S. Kret,
J. Auleytner,
D. Żymierska
Publication year - 2002
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.102.259
Subject(s) - nanostructure , materials science , annealing (glass) , ion implantation , laser , ion , nanotechnology , optoelectronics , optics , metallurgy , chemistry , physics , organic chemistry