Open AccessStudy of Si-Implanted and Thermally Annealed Layers of Silicon by Using X-ray Grazing Incidence Methods
Author(s) -
D. Klinger,
M. LefeldSosnowska,
J. Pełka,
W. Paszkowicz,
P. Gierłowski,
P. Pankowski
Publication year - 2002
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.101.795
Subject(s) - materials science , silicon , x ray , grazing , optoelectronics , optics , physics , agronomy , biology