Open AccessFine Diffraction Effects in Si Single Crystals Implanted with Fast Ar Ions and Annealed
Author(s) -
D. Żymierska,
K. Godwod,
J. Adamczewska,
J. Auleytner,
J. Choiński,
K. Regiński
Publication year - 2002
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.101.743
Subject(s) - materials science , ion , diffraction , crystallography , annealing (glass) , single crystal , optics , chemistry , physics , composite material , organic chemistry