Open AccessThe Influence of the Magnetron Sputtering Deposition Parameters on Optical Properties of a-C:H Thin Films
Author(s) -
Gabriel Lazăr
Publication year - 2001
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.100.67
Subject(s) - materials science , sputter deposition , deposition (geology) , thin film , cavity magnetron , optoelectronics , high power impulse magnetron sputtering , sputtering , optics , nanotechnology , physics , geology , paleontology , sediment