Open AccessLow-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition
Author(s) -
Pablo Orús,
Fabian Sigloch,
Soraya Sangiao,
J. M. De Teresa
Publication year - 2022
Publication title -
open research europe
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2732-5121
DOI - 10.12688/openreseurope.15000.1
Subject(s) - electrical resistivity and conductivity , materials science , deposition (geology) , cathode ray , electron beam induced deposition , electron , optoelectronics , beam (structure) , optics , electrical engineering , physics , geology , engineering , nuclear physics , paleontology , sediment