Open AccessAn Optical Characterization of Film Defect Based on the Classification
Author(s) -
媛媛 张
Publication year - 2011
Publication title -
cai liao ke xue
Language(s) - English
Resource type - Journals
eISSN - 2160-7613
pISSN - 2160-7621
DOI - 10.12677/ms.2011.11005
Subject(s) - materials science , characterization (materials science) , nanotechnology